E02700 - SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity Revision:SEMI E27-1017 - Superseded Critical pressure drop ratio factor

Critical pressure drop ratio factor (xT )

1-1020 (technical revision)

services and behaviors described for the VPD are either required or optional for each pump type

Standard for Sensor/Actuator Network Common Device Model (CDM)

In the case of the Guide

E02700 - SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity Revision:SEMI E27-1017 - Superseded Critical pressure drop ratio factorThe purpose of this Standard is to establish a uniform, worldwide definition of linearity in order to prevent confusion and misunderstanding between manufacturers and users of mass flow devices. A linearity specification is used to allow prediction to a known level of uncertainty, the output of a mass flow controller (MFC) at points other than those at which its output is known. The scope is to define the linearity of the MFC (controller with integral