T01000 - SEMI T10 - Test Method for the Assessment of 2D Data Matrix Direct Mark Quality Revision:SEMI T10-0701 (Reapproved 0923) - Current components

components

The Guide results should be representative of full-scale applications

Two methods for evaluating particle contribution are provided

No useful figure capable of showing the arrangement of components for all microscope designs is available

SEMI E40-1106 (technical revision)

T01000 - SEMI T10 - Test Method for the Assessment of 2D Data Matrix Direct Mark Quality Revision:SEMI T10-0701 (Reapproved 0923) - Current componentsThis Standard is intended to define the methodology for the assessment of 2D Data Matrix direct mark quality. This Standard defines assessment criteria, metrology methods, and assessment reporting procedures as applied to 2D Data Matrix code direct marks on semiconductor related materials. Application specifications, which refer to this Standard, may further limit its scope to more specific requirements of a particular application. Referenced SEMI