E06200 - SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース（FIMS）の仕様 Revision:SEMI E62-1106 - Superseded • edge widths

• edge widths

SEMI F72-0214 (technical revision)

• A definition of the basic SECS-II communications capabilities of semiconductor manufacturing equipment

This Standard specifies limits on the footprint

and verification at the commercial sales/purchase interface

E06200 - SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース（FIMS）の仕様 Revision:SEMI E62-1106 - Superseded • edge widthsglobal Physical Interfaces & Carriers Technical Committee20111224global Audits and Reviews Subcommittee20125www. semiviews. org www. semi. org1997200611 : Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E15 Specification for Tool Load Port SEMI E19 Standard Mechanical Interface (SMIF) SEMI E47. 1 Mechanical Specification for Boxes and Pods Used to Transport and Store 300mm