F02400 - SEMI F24 - Specification for Particle Concentration of Grade 10/0.2 Inert Specialty Gases StdPbc-1019 and dead band under a

and dead band under a set of closely controlled test conditions

it should be discussed beforehand with the customer

SEMI E134-0305 (designation update)

The experimental data were provided by volunteer participants in this study and have not been independently verified

any service outage is usually unacceptable

F02400 - SEMI F24 - Specification for Particle Concentration of Grade 10/0.2 Inert Specialty Gases StdPbc-1019 and dead band under aThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in December 2017; originally published June 1997; previously published July 2012. The purpose of this Document is to set a maximum permissible particle concentration for 10 0. 2 grade inert specialty gases and to