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本スタンダードは，Liquid Chemicals Global Technical Committeeで技術的に承認されている。現版は2014年8月25日，global Audits and Reviews Subcommitteeにて発行が承認された。2014年11月にwww
This Standard does not cover the unit size design or configuration
This specification was technically approved by the Global Liquid Chemicals Committee
including mold conditions
M02600 - SEMI M26 - Guide for the Re-Use of 100, 125, 150, and 200 mm Wafer Shipping Boxes Used to Transport Wafers Revision:SEMI M26-0304 (Reapproved 1110) - Inactive as appropriateThis guide was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www. semi. org February 2004; to be March 2004. Originally published in 1995; last published in 1996. This document is a guide for box cleaning services, wafer suppliers, and wafer users for the
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