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T01500 - SEMI T15 - Specification for Jig ID: Concept StdTpc-Silicon Materials & Process Control SEMI P38 — Specification for

SKU: 95431055231
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Description

SEMI P38 — Specification for Absorbing Film Stacks and Multilayers on Extreme Ultraviolet Lithography Mask Blanks (Withdrawn 0710)

3 technology

2  This Standard specifies the application of the appropriate processing to specified material received at the processing agent

as well as accessories internal to wet equipment (e

Gas delivery systems include gases delivered from a solid

T01500 - SEMI T15 - Specification for Jig ID: Concept StdTpc-Silicon Materials & Process Control SEMI P38 — Specification forThe purpose of this Standard is to establish generic Jig ID to identify individual jigs uniquely, mounted on the jig to process semiconductor devices. This Standard specifies the following contents of IDs to be installed onto the jigs used in the process of semiconductor manufacturing. Types of IDs Data format Referenced SEMI Standards (purchase separately) SEMI T12 Specification of Tracing Jigs and Implements Revision History SEMI T15 0818

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