C00324 - SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality StdPbc-0924 contamination arising in its manufacture

contamination arising in its manufacture

SEMI D22-0818 (Reapproved 0924)

It has been replaced by SEMI F118

if not all

注意：這個翻譯是一個參考版本。如果您在使用上，發現中文翻譯版本與英文原文版本產生任何差異或是不確定之處，請務必參考英文原文版本，並以英文原文版本為主，英文原文版本屬於正式和權威的版本。

C00324 - SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality StdPbc-0924 contamination arising in its manufactureThe purpose of this Document is to provide specifications for sulfur hexafluoride (SF6) that is used in the semiconductor industry. This Document covers requirements for sulfur hexafluoride used in the semiconductor industry. Referenced SEMI Standards SEMI C3 Specification for Gases