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運用（§12）
本安全基準係確保在製造設備運送移動前，雖受制於個別實務情況之限制，仍儘最大可能地執行除污作業。在許多情況下，必須破壞製造設備才能完整進行化學品除污，製造設備轉讓人(transferor)必須將所有殘存之潛在風險清楚告知受讓人(transferee)。
The purpose of this Document is to define a method for characterizing a mass flow controller (MFC) being considered for installation into a gas distribution system
NOTICE: The designation of this standard was updated during the 0704 publishing cycle to reflect the creation of SEMI E36
equipment concept etc
S01900 - SEMI S19 - 製造装置の設置，保守，サービス要員のトレーニングのための安全ガイドライン StdPbc-0309 運用（§12）NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Environmental Health & Safety Committee201123global Audits and Reviews Subcommittee20113www. semiviews. org www. semi. org200211 EHS EHS EHS Referenced SEMI Standards None.
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