E13400 - SEMI E134 - Specification for Data Collection Management StdPbc-1110 This Standard covers a definition

This Standard covers a definition of new recipe space named Production Recipe Cache (PRC) as one of secured recipe space in equipment

such as a hard mask

this Document provides direction for describing the dimensions

本スタンダードは2003年10月に編集上の修正がなされた。§§§3

FPD用ガラス基板の有効範囲外に刻印されるマーキングシンボルの内容・寸法・位置（表面上の）を記述している。

E13400 - SEMI E134 - Specification for Data Collection Management StdPbc-1110 This Standard covers a definition* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1