E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Revision:SEMI E130-0618 (Reapproved 0723) - Current 2-0698 (first published)

2-0698 (first published)

8 — Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment

SEMI D29-1101 (first published)

• Recipe linkage

Hydrogen chloride is a colorless

E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Revision:SEMI E130-0618 (Reapproved 0723) - Current 2-0698 (first published)This Standard establishes a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300). The PSEM300 consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented. The intent of this Standard is to facilitate the integration of prober equipment into an automated semiconductor factory. This Standard