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A 450 mm wafer frame cassette has the following components and optional components
NOTICE: This Document was reapproved with minor editorial changes
It was available at www
SEMI M57-1011 (technical revision)
The purpose of the Object Services Standard (OSS) is to provide general terminology
M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded A 450 mm wafer frameglobal Compound Semiconductor Materials Committee2006116global Audits and Reviews Subcommittee20062www. semi. org20063CD ROM E20068R2 2 Referenced SEMI Standards None.
