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and Availability of Equipment
Methods of measurements suitable for determining the characteristics in the specifications are indicated
the Current version is the official and authoritative version
previously published November 2002
orgで入手可能となる。初版は1995年発行。前版は2002年11月発行。
D01600 - SEMI D16 - FPDマテリアルハンドリングシステムとツールポート間の機械的インタフェース仕様 StdPbc-1122 and Availability of EquipmentFlat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee19987North American Regional Standards Committee19987SEMI On Line19989 FPD WIPAGV Referenced SEMI Standards SEMI D5 Standard Size for Flat Panel Display Substrates SEMI D11 Specification for Flat Panel Display Glass Substrate Cassettes
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