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instrument configuration
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The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry
This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17
It oxidizes readily and rapidly to release hydrogen chloride
C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) StdPbc-0519 instrument configurationThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011; originally published in 1997; previously published September 2006. NOTICE: This Document was balloted and approved for withdrawal in 2011. Silane is a pyrophoric, flammable colorless gas.
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