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In response to these needs
SEMI D60-0818 (technical revision)
The output of PTM is an analysis-ready data set
XML Three Tier Model Architecture
Height and Weight
E08400 - SEMI E84 - 캐리어 핸드오프 병렬 I/O 인터페이스 강화 사양 StdPbc-0313 In response to these needsGlobal Physical Interfaces & Carriers Committee , 2009 9 4 Global Audits and Reviews Subcommittee . 1999 6 , 2007 11 . 2009 10 www. semi. org . , FOUP (open cassettes) (carrier) (AMHS) . AMHS (PI O) (control) (carrier) (handoff) ( ) . (carrier) SEMI E23 I O . (handoff), (handoff) , . (, AGV, RGV OHT AMHS ) (, ; ) (handoff) , (interbay) AMHS (, OHS ) (, OHS ) . AMHS (handoff) (carrier) I O . Figure 1 2 AHMS . (carrier) (handoff) I O : ( 6. 1) (carrier)
