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SEMI 3D13-0715 (Reapproved 0222)
The purpose of this Document is to standardize requirements for trimethylborate used in the semiconductor industry and testing procedures to support those standards
SEMI E5-0709E (editorial revision)
SEMI M21 — Specification for Assigning Addresses to Rectangular Elements in a Cartesian Array
dual-in-line
E10000 - SEMI E100 - 6インチまたは230 mmのレチクルの搬送および保管に用いられるレチクルSMIFポッド（RSP）の仕様 StdPbc-1113 SEMI 3D13-0715 (Reapproved 0222)Global Physical Interfaces and Carriers Committee2010430Global Audits and Reviews Subcommittee20106www. semi. org20002200411 IC6230 mmSMIF PODRSP Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E30. 1 Inspection and Review Specific Equipment Model (ISEM) SEMI E47. 1 Mechanical Specification for FOUPS Used to Transport and
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