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Automated test equipment
2 The processing of the micro-chevron test structures (including steps such as the etching used to create the micro-chevron pattern
previously published August 2015
1-0704 - Specification for the Semiconductor Equipment Manufacturing Information Tagging Standard E36
SEMI M1-92 (technical revision)
T01400 - SEMI T14 - Specification for Micro ID on 300 mm Silicon Wafers Revision:SEMI T14-1104 - Superseded Automated test equipmentThis specification was technically approved by the global Traceability Committee and is the direct responsibility of the Japanese Traceability Committee. Current edition approved by the Japanese Regional Standards Committee on July 23, 2004. Initially available at www. semi. org September 2004; to be published November 2004. NOTICE: The designation number of T14 was updated during the 0705 cycle to reflect the creation of T14. 1. The purpose of this
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