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The purpose of this Specification is to provide the semiconductor industry with support in the identification and elimination of product time waste in the product life cycle within the factory
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
microelectromechanical systems [MEMS])
In the case of the guidelines
E17000 - SEMI E170 - Specification for Secured Foundation Of Recipe Management System (SFORMS) Revision:SEMI E170-0215 - Superseded black matrixThe purpose of this Standard is to provide a standardized secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones. The purpose of this Standard is to provide a standardized secure, safe and efficient recipe operation mechanism between RMS and equipment which especially supports RMS with the following concepts:
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