E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility StdPbc-1225 The equipment

The equipment

The scope of this Standard is limited to the usage and description of AMHS storage equipment (Stockers) as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 13)

This Standard describes procedures for measuring the mechanical

With increased levels of integration

SEMI D39-0704 (Reapproved 0710)

E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility StdPbc-1225 The equipmentThe purpose of this Guide is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing environments. It is a guide for establishing electrostatic compatibility in facilities used for semiconductor manufacturing. Electrostatic compatibility of production equipment is addressed in SEMI E78. Electrostatic surface charge causes a number of undesirable effects in semiconductor manufacturing