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and ALE techniques and their effect on device performance
The purpose of this Document is to standardize requirements for sodium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards
previously published December 1996
Topic & Readings
it is expected that equipment-specific host software may be required to support the full capabilities of the equipment
C04800 - SEMI C48 - Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade StdTpc-300 mm Packaging and ALE techniques and theirThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in August 2012; originally published in 1988; previously published July 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been
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