E12100 - SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications Revision:SEMI E121-0304 - Superseded SEMI E39 —Object Services Standard:

SEMI E39 —Object Services Standard: Concept

SEMI E133-0705 (technical revision)

except on the transparent display and HDR display

SEMI E6-82 (first published)

previously published March 2010

E12100 - SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications Revision:SEMI E121-0304 - Superseded SEMI E39 —Object Services Standard:The inclusion of eXtensible Markup Language (XML) notation within current SEMI Standards reflects the industrys growing interest in XML technology. This Guide is the first step to prepare for XML protocols in SEMI Standards and to establish consistency in XML style and usage. Recommendations given in this Document are intended for the definition and conformance of XML based standards. This Document also attempts to highlight those areas where