D03800 - SEMI D38 - Guide for Quality Area of Flat Panel Display (FPD) Masks StdTpc-Equipment Communications The purpose of this Specification

The purpose of this Specification is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards

previously published June 2000

SEMI D6 — Specification for Edge Length and Thickness for Flat Panel Display Mask Substrates

8 mm to 1620 mm × 1780 mm

originally published in 1995

D03800 - SEMI D38 - Guide for Quality Area of Flat Panel Display (FPD) Masks StdTpc-Equipment Communications The purpose of this SpecificationThis Guide defines the quality area of FPD masks. This Guide applies to masks that are principally used in fabricating flat panel displays. The mask size specifies range from 202. 8 mm 202. 8 mm to 1620 mm 1780 mm. Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1). Referenced SEMI Standards (purchase separately) SEMI D6 Specification for Flat Panel Display (FPD) Mask Substrates SEMI