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This Standard was technically approved by the Flat Panel Display – Color Filter & Optical Elements Global Technical Committee
the integrity of these parts is very important for the performance of EFFU
it does not define the internal operation of the equipment
• Film deposition equipment (chemical vapor deposition [CVD] and physical vapor deposition [PVD])
· Chemical mechanical polishing/planarization equipment
C06400 - SEMI C64 - SEMI Statistical Guidelines for Ship To Control Revision:SEMI C64-0308 - Superseded This Standard was technically approvedTo provide a set of guidelines for the quantitative determination of statistically derived limits from process data for the purpose of defining and maintaining ship to control (STC) limits. This Guide applies to specified properties of specific products for which it is desired to use statistically derived control limits upon which customer notification, negotiated disposition of product, or statistical specifications can be based. Referenced SEMI
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