A00400 - SEMI A4 - Specification for the Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS) Revision:SEMI A4-0421 - Superseded and microfluidic devices including valves

and microfluidic devices including valves and pumps

適用　－　このガイドラインでは，下記事項を含む入手可能な情報の検討及び評価を行う。

3  This Guide provides a specification framework for reporting measurements of silicon wafer surface features through the use of scanning (or automated) surface inspection systems (SSIS)

本文件适用于未使用的关键腔室部件（CCC）或其零件。

The metric calculated by this Test Method is based on a height data array

A00400 - SEMI A4 - Specification for the Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS) Revision:SEMI A4-0421 - Superseded and microfluidic devices including valvesNOTICE: The designation of SEMI A4 was updated during the 0821 publishing cycle to reflect the publication of SEMI A4. 1. 1 Purpose 1. 1 Semiconductor test operations involving automated test equipment (ATE) today are experiencing increasing use of data for real time data analysis and real time ATE input and control, to improve test yield, throughput, efficiency, and product quality. At the same time, test equipment and test operations around the