E15600 - SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment Revision:SEMI E156-1115 - Inactive 2-1022 (first published)

2-1022 (first published)

and post-processing steps) in the equipment independently

Referenced SEMI Standards (Purchase separately)

• Recipe identification and uniqueness control

• Type of an equipment under test (EUT) liquid-borne particle counter

E15600 - SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment Revision:SEMI E156-1115 - Inactive 2-1022 (first published)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to define interfaces between automated material handling systems (AMHS) stocker and different types of transport equipment and to clarify dimensions required for 450 Wafer Carrier