E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) StdPbc-1218 SEMI E40-1101 (technical revision)

SEMI E40-1101 (technical revision)

4 is no longer published within the SEMI E19 family of Standards

SEMI E18-91 (Reapproved 0299)

This Specification provides the structure of SEMIs Sensor/Actuator Network (SAN) Standard

SEMI E143 — Test Method for Measuring Power Variation into a 50 Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2

E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) StdPbc-1218 SEMI E40-1101 (technical revision)This Standard describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor actuator communication network. This Standard is applicable to sensors which are regarded as data producers only.