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The purpose of this Document is to define a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system
and 22 nm (Table R1-3) device technology generations
orgで。初版は1993年発行，前版は2000年2月に発行された。
The specification only describes information that is static in nature (i
SEMI E157-0710 (first published)
P03500 - SEMI P35 - Terminology for Microlithography Metrology StdVol-HB-LED The purpose of this DocumentThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in September 2013. Originally published February 2000; previously published November 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status
