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chip on substrate (CoS)
To define the specification and analytical methods and validate the specifications for diborane mixtures
The Guide focuses on analysis of HPIX resin used in UPW
which will
org in July 2013
D02000 - SEMI D20 - FPDマスク欠陥の用語 Revision:SEMI D20-0706 - Superseded chip on substrate (CoS)global Flat Panel Display Mask Committee2006516global Audits and Reviews Subcommittee20066www. semi. org20067CD ROM1993200010 FPD FPD Referenced SEMI Standards None.
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