E16900 - SEMI E169 - Guide for Equipment Information System Security Revision:SEMI E169-0615 - Superseded SEMI F29-0997 (first published)

SEMI F29-0997 (first published)

超純水（UPW）

start of construction

18-0914 (Reapproved 1125)

SEMI E113-0306 (Reapproved 0518)

E16900 - SEMI E169 - Guide for Equipment Information System Security Revision:SEMI E169-0615 - Superseded SEMI F29-0997 (first published)The purpose of this Standard is to establish a common basis for equipment information system security. This can be shared among users and suppliers of semiconductor manufacturing equipment, suggesting concepts, and measures of information security. This Standard is expected to: Provide guidelines of applying appropriate security measures for equipment to optimize cost, delivery, and reliability. Make the design of user security systems easier and more