G09100 - SEMI G91 - Standard Test Data Format (STDF) Memory Fail Datalog Revision:SEMI G91-0513 - Inactive Aspects of the 200 mm

Aspects of the 200 mm (8 in

The testing method proposed in this standard includes dynamic CBU and static CBU

This Specification defines the properties of silicon epitaxial wafers with buried layers that relate to the characteristics of photolithography

Appropriate information is summarized in § 5

wafer size conversion

G09100 - SEMI G91 - Standard Test Data Format (STDF) Memory Fail Datalog Revision:SEMI G91-0513 - Inactive Aspects of the 200 mmNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Standard is to provide a common format for memory fail datalog specification along with necessary synchronization information enabling an efficient dataflow for volume diagnostics applications for