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G00500 - SEMI G5 - 仕様 セラミックチップキャリア(CCC) Revision:SEMI G5-87 - Inactive SEMI D66-0212 (first published)

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4.5

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Description

SEMI D66-0212 (first published)

that has the following capabilities

system) that interact with the equipment

Deionized (DI) Water Heaters — DI water heaters are included within the scope of this Document when the heated DI water is used as a ‘process liquid’ as defined in § 5

previously published in 1988

G00500 - SEMI G5 - 仕様 セラミックチップキャリア(CCC) Revision:SEMI G5-87 - Inactive SEMI D66-0212 (first published)Referenced SEMI Standards SEMI G6 Test Method for Seal Ring Flatness SEMI G8 Test Method for Gold Plating Quality SEMI G25 Test Method for Measuring the Resistance of Package Leads

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