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and 3) back sheet and back surface layer
This Guide contains the following sections:
1 Ωcm for n-type silicon (refer to SEMI MF1188)
the attributes of the epitaxial layer are not included the specification requirements
A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI) StdPbc-0226 注意：在此指導方針中所稱"應該"條款之一致性必須宣告與本文件之一致性，所稱"可能"、"建議"、"首選"、"推薦"、"注意"或"相關資訊"條款則並不一定要宣告其一致性。* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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