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InP and GaP
This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31
This Test Method covers the measurement of the resistivity of single-crystal bars having cross sections that are uniform in area and square
It is shipped in cylinders as a liquefied gas under its own vapor pressure
on the other hand treat different angular positions differently and do not typically provide full coverage of the wafer edge
E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) StdPbc-0814 InP and GaPE This Standard was editorially modified to correct a publication error. A correction was made to Figure 1. This Specification provides a standardized behavior for host communication with manufacturing equipment during the removal, installation and usage of consumables and durables. This Specification defines objects and state models that define the interaction between the host and equipment in the following scenarios: Durable removal, installation,
