E05422 - SEMI E54.22 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges Revision:SEMI E54.22-0613 - Superseded This Specification describes equipment provided

This Specification describes equipment provided services to the factory that supports a high level of factory automation

The purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard

Total Thickness Variation (TTV)

overcoat layer

Existing specifications for the EUV substrate

E05422 - SEMI E54.22 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges Revision:SEMI E54.22-0613 - Superseded This Specification describes equipment providedThis Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects which are common to all Vacuum Pressure Gauges on a semiconductor equipment Sensor Actuator communications network. This Specification specifically addresses the minimum attributes, services,