E11700 - SEMI E117 - レチクルロードポートの仕様 StdTpc-Package & Chip Carrier Tooling SEMI E5-0699 (technical revision)

SEMI E5-0699 (technical revision)

cleaning and replacement more accurately

SEMI E134-0313 (technical revision)

rotomolding

on the other hand treat different angular positions differently and do not typically provide full coverage of the wafer edge

E11700 - SEMI E117 - レチクルロードポートの仕様 StdTpc-Package & Chip Carrier Tooling SEMI E5-0699 (technical revision)global Physical Interfaces and Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org200211200411 RSP Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19. 3 Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E72 Specification and Guide for 300 mm Equipment