F07400 - SEMI F74 - ガス供給システムに使用されるメタルシール設計の性能と評価のためのテスト方法 Revision:SEMI F74-1103 (Reapproved 0710) - Inactive 1-1110 (technical revision)

1-1110 (technical revision)

This Document defines a communication specification based on the MOTIONNET® protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment

and at other times as seems necessary

SEMI D75-0524 (technical revision)

SEMI E88-0702 (technical revision)

F07400 - SEMI F74 - ガス供給システムに使用されるメタルシール設計の性能と評価のためのテスト方法 Revision:SEMI F74-1103 (Reapproved 0710) - Inactive 1-1110 (technical revision)Referenced SEMI Standards SEMI E49 Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies SEMI F1 Specification for Leak Integrity of High Purity Gas Piping Systems and Components