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単位 － SI単位系を使用する。
帯電したウェーハやレチクルの表面は微粒子を吸着（静電気吸着，ESA： electrostatic attraction）し，不良率を増やす｡
These include a generalized drawing of the component
This Specification covers dimensional
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E01905 - SEMI E19.5 - Specification for 300 mm Bottom-Opening Standard Mechanical Interface (SMIF) Revision:SEMI E19.5-0996 (Withdrawn 1103) - Withdrawn 単位 － SI単位系を使用する。NOTE: SEMI E19. 5 is no longer published within the SEMI E19 family of standards. It is published and sold separately on this page. NOTICE: This document was balloted and approved for withdrawal in 2003. This standard specifies a standard interface for containers intended to control the transport environment of contained wafers. The interface must address the proper container orientation for material transfer and maintain continuity between the
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