F00200 - SEMI F2 - Specification for 316L Stainless Steel Tubing for General Purpose Semiconductor Manufacturing Applications Revision:SEMI F2-94 (Withdrawn 0703) - Withdrawn 本文件提供指導用以評估由製造設備(ME)所排放的含氟溫室氣體(F-GHG)。

本文件提供指導用以評估由製造設備(ME)所排放的含氟溫室氣體(F-GHG)。

to set scatter levels

simplify ATE performance monitoring

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Silicon technology underlies the integrated circuit and device industry

F00200 - SEMI F2 - Specification for 316L Stainless Steel Tubing for General Purpose Semiconductor Manufacturing Applications Revision:SEMI F2-94 (Withdrawn 0703) - Withdrawn 本文件提供指導用以評估由製造設備(ME)所排放的含氟溫室氣體(F-GHG)。NOTICE: This Document was balloted and approved for withdrawal in 2003. The purpose of this Specification is to identify the applicable ASTM tubing specification requirements and to define the special material chemical composition requirements for 316L stainless steel tubing which is to be used for general purpose applications in semiconductor manufacturing facilities. This Specification covers grades of nominal wall thickness stainless steel tubing