S02900 - SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction Revision:SEMI S29-0712 - Inactive 装置と対話するエンティティ（人，プロセス，システム）

装置と対話するエンティティ（人，プロセス，システム）

It covers an in-line

保護されるべき資産（装置情報資産）

purchasing policy may also force procurement from non-certified distributors

SEMI C36-1107 (technical revision)

S02900 - SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction Revision:SEMI S29-0712 - Inactive 装置と対話するエンティティ（人，プロセス，システム）This Standard was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in July 2012. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are