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SEMI E29-1110 (Reapproved 0417)
本基準提供設計考量事項，以期盡可能減少SME或其零組件在壽命終了處理階段對環境的影響。
This Standard was technically approved by the Gases Global Technical Committee
but this approach is not recommended due to a higher combined standard uncertainty value
SEMI F5 — Guide for Gaseous Effluent Handling
M02100 - SEMI M21 - カーテシアン（デカルト）アレイにおける方形エレメントへの割当アドレスのガイド StdPbc-0723 SEMI E29-1110 (Reapproved 0417)global Silicon Wafer Committee2010827 global Audits & Reviews Subcommittee201010www. semi. org199220043 Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M17 Guide for a Universal Wafer Grid SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology of Silicon Technology
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