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限制（第3節）
This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28
The number of bins varies by vendor and model
EQIPs may be defined for a new equipment type not previously addressed in this Standard
inclusion stringers
E18100 - SEMI E181 - Specification for Panel FOUP for Panel Level Packaging Revision:SEMI E181-0424 - Current 限制（第3節）The purpose of this Specification is to establish basic physical dimensions for the Panel FOUP intended to be used to transport and store panels, as specified by SEMI 3D20 for 510 mm 515 mm panel size and 600 mm 600 mm panel size. This Specification is intended to define the reference planes for the dimensions of the Panel FOUP and the panel load port. This Specification is intended to define a set of requirements to ensure interoperability of load
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