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to be published October 2000
which includes:
and Total Thickness Variation on Silicon Wafers by Automated Noncontact Scanning
as considered in this Guide may include two or more wafers
1 This Specification describes a method for data acquisition EDA Applications to request process and data from equipment to be communicated in an automated fashion by the equipment
E14800 - SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object Revision:SEMI E148-0309E - Superseded to be published October 2000The purpose of this Standard is to define the requirements for any factory component computer clock that requires synchronization of time to maintain and manage date time accurately and consistently by using a common time synchronization protocol. This Standard defines the TS Clock object for accessing factory application and equipment time value and synchronization status, describes an example of network time synchronization architecture, and
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