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C00333 - SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional) Revision:SEMI C3.33-92 (Reapproved 0303) - Superseded SEMI C93-0620 (technical revision)

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Description

SEMI C93-0620 (technical revision)

The purpose of this Test Method is to provide a standardized test method for measuring the density of slurries

SEMI C90-00-1015 (first published)

Hydrogen chloride is shipped as a liquefied compressed gas stored under its own vapor pressure

They effect the means for producing

C00333 - SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional) Revision:SEMI C3.33-92 (Reapproved 0303) - Superseded SEMI C93-0620 (technical revision)This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in March 2012; originally published in 1987; previously published March 2003. NOTICE: This Document was balloted and approved for withdrawal in 2011; replaced by SEMI C71, Specification and Guide for Boron

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