C00341 - SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality StdTpc-Chemical & Gas Distribution Systems as tool and measurement techniques

as tool and measurement techniques continue to evolve and improve

It was available at www

2 cm (30 in

applied to all substrates

本文書は，梱包に要求される必要最小限の品質と自動化へ要求を確保した上で，梱包資材，保管，輸送の観点でコスト低減に配慮した梱包仕様を提供することを最大の目的とする。

C00341 - SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality StdTpc-Chemical & Gas Distribution Systems as tool and measurement techniquesThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 11, 2004. Available at www. semi. org in November 2004; originally published in 1990; previously published July 2003. NOTICE: This Document was balloted and approved for withdrawal in 2004. Oxygen is a colorless, odorless, and oxidizing gas. It supports combustion. Referenced