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org in October 2010
本方法で試験する融着接合部は，PFA融着継手でできている。
1-0306 (first published)
This guide document provides additional information about the Equipment Data Acquisition (EDA) SEMI Standards suite
SEMI E23-1104 (Reapproved 0710)
F01200 - SEMI F12 - フッ素樹脂製フィッティングの熱サイクル負荷後のシール性能決定の試験方法 Revision:SEMI F12-0998 - Inactive org in October 2010NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
