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Such an instrument can also be used for measurements on thin silicon or other thin conducting films on nonconductive substrates
SEMI E5-94 (technical revision)
SEMI C36-1107 (technical revision)
The PV encapsulation includes lamination properties and encapsulated materials used in in PV modules such as ethylene vinyl acetate (EVA)
SEMI MF1569-0705 (technical revision)
E19500 - SEMI E195 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components Revision:SEMI E195-0925 - Current Such an instrument can also1 Purpose 1. 1 This Test Method describes a quantitative analysis method to measure the ISO 14644 9 surface cleanliness for particle concentration (SCP) of a critical chamber component (CCC) by means of an adhesive replacement substrate (ARS), which removes particles from the CCC surfaces of interest. The ARS is subsequently measured with a scanning surface inspection system (SSIS), typically a scatterometer, for particle counting, and with scanning
