HB01000 - SEMI HB10 - Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB-LED Wafers Revision:SEMI HB10-1018 - Inactive hard mask and copper diffusion

hard mask and copper diffusion barrier precursor

where the metal detection limits are 108 to 1010 atoms/cm2

check valves

5-0302 (Reapproved 0423)

some of which quantify more specific aspects

HB01000 - SEMI HB10 - Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB-LED Wafers Revision:SEMI HB10-1018 - Inactive hard mask and copper diffusionNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Sapphire has become the most popular substrate material in the HB LED industry. This Standard identifies and defines the key parameters of sapphire intended for use in manufacturing HB LED wafers. The properties of sapphire