C00357 - SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders StdPbc-1224 2 This Specification and Guide

2  This Specification and Guide also provides assay and impurity limits for higher purity Tiers of sulfuric acid for which a need has been identified

please contact your local SEMI office to inquire about the SEMIViews Enterprise License

and in front of or on the tool face

diameter/thickness)

the other is quantitative

C00357 - SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders StdPbc-1224 2 This Specification and GuideThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published June 2000; previously published March 2012. The purpose of this Document is to provide specification for carbon dioxide (CO2) that is used in the semiconductor industry. This