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Significance — The edges of a flat panel display substrate are important in both the specifications for and uses of the material
as well as information and advice on performing a useful general electrostatic survey
This Specification is based on the RFID parameters currently being used in the majority of semiconductor equipment production use applications
conductivity type and polarity of the analyzed side of the material is irrelevant
This Specification provides metrics for measuring equipment productivity of manufacturing equipment in the semiconductor and related industries
P04000 - SEMI P40 - 極紫外線リソグラフィマスクの取り付けに関する要求条件およびアライメント基準位置の仕様 Revision:SEMI P40-1103 - Superseded Significance — The edges ofGlobal Micropatterning CommitteeNorth American Micropatterning Committee200393North American Regional Standards Committee20039www. semi. org200311 EUVL Referenced SEMI Standards SEMI P37 Specification for Extreme Ultraviolet Lithography Mask Substrates SEMI P38 Specification for Absorbing Film Stacks and Multilayers on Extreme Ultraviolet Lithography Mask Blanks
