M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals StdTpc-Mask and Mask Equipment This test is especially useful

This test is especially useful for analyzing metallic elements such as K

本スタンダードは，ウェーハの品質を維持しながら，ウェーハサプライヤから顧客（主にIC製造者）へ450 mm径ウェーハを搬送するのに使用されるフロントオープニングシッピングボックス（front-opening shipping Box: FOSB）を規定する。

This parallel I/O interface only controls the automated handoff operation of the carrier

and granules

under a set of closely controlled test conditions

M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals StdTpc-Mask and Mask Equipment This test is especially usefulThe purpose of this document is to present a process for ion implantation, activation, and measurement of the resulting layers so that meaningful comparisons can be made between various lots of semi insulating GaAs. This test will be performed by the supplier so that product may be represented in a standard way. Referenced SEMI Standards None.