PV05300 - SEMI PV53 - Test Method for In-Line Monitoring of Flat Temperature Zone in Horizontal Diffusion Furnace Revision:SEMI PV53-0514 (Reapproved 1220) - Current 6 — Specification for Phosphine

6 — Specification for Phosphine (PH3) in Cylinders 99

but the operator must appreciate that the contrast is an average over the beam spot on the polarizer

注意：　本文書は，編集上の修正を伴い再承認された。

FPD製造装置で0

Limitations

PV05300 - SEMI PV53 - Test Method for In-Line Monitoring of Flat Temperature Zone in Horizontal Diffusion Furnace Revision:SEMI PV53-0514 (Reapproved 1220) - Current 6 — Specification for PhosphineThis Document covers the test method of flat temperature zone in horizontal diffusion furnace including the testing principle, testing devices, environment, testing steps and the calculation of the flat temperature zone. This Test Method is used for testing flat temperature zone in horizontal diffusion furnace. Horizontal PECVD equipment, horizontal vacuum annealing furnace, horizontal alloy furnace and other similar equipments can also be implemented